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cyberTECHNOLOGIES develops and manufactures
high-end 3D surface measurement systems
for industrial and scientific applications.

Wafer Profilometer

The CT 300 is a non-contact profilometer with a 315 mm x-, y-motion system. It can handle up 12” wafers or other large substrates and parts.

Using a chromatic white light sensor and a data collection rate of up to 20 kHz the inspection time is minimized. The confocal microscope and 3D white light interferometer sensors offer unmatched resolution in z-direction down to 0.1 nm. With our multi-sensor technology several sensor heads can be mounted simultaneously including infrared interferometers for measureing wafer thickness.


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